Model No. | CBR1000 | CBR2000 | |
Column | Range | 320 ~ 620 mm | |
Drive unit | Range | 100 ~ 200 mm | |
Indicating accuracy[1] | ± (1+2L/100) μm | ± (0.8+2L/100) μm | |
Detector | Range | ± 300 μm | ± 500 μm |
Range resolution ratio | 1:65536 | 1:262144 | |
Indicating accuracy[1] | ≤ ± (7nm+ 3.5%) | ≤ ± (5nm+ 3.5%) | |
Repeatability[2] | 1σ≤2 nm | 1σ≤1 nm | |
Accuracy | Residual noise[3] | ≤ 10 nm | ≤ 5 nm |
Drive Speed | X axis (horizontal direction) | 0.1 ~ 10 mm/s | 0.05 ~ 15 mm/s |
Z axis (column) | 0.5 ~ 10 mm/s | 0.2 ~ 15 mm/s | |
Roughness Measurement Function | Roughness Function: Ra, Rp, Rv, Rz, Rz(jis), R3z, RzDIN, Rzj, Rmax, Rc, Rt, Rq, Rsk, Rku, Rsm,Rs, R△q, Rk, Rpk, Rvk, Mr1, Mr2, Rmr Waveness Parameter: Wa, Wt, Wp, Wv, Wz, Wq, Wsm, Wsk, Wku, Wmr Original Contour Parameter: Pa, Pt, Pp, Pv, Pz, Pq, Psm, Psk, Pku, Pmr |