Features: 
Higher accuracy performance roundness and cylindricity measuring.
More measurement and analysis functions

Application:





Technical Specification:
 

Model No.		CBS4100	CBS4200
Turntable unit	Bearing type	Air-floating
	Rotary accuracy[1]	(0.025+6H/10000) μm
	Rotary speed	6 rpm	4 / 6 / 8 /10 rpm
	Table effective diameter	180 mm
	Max. workpiece diameter	420 mm	560 mm
	Max. measuring diameter	250 mm	280 mm
	Max. table load-bearing	25 kg
Vertical axis (Z axis)	Vertical motion range	320 mm
	Vertical motion drive way	by electric
	Column straightness[2]	≤0.5 μm / 100 mm	≤0.3 μm / 100 mm
	Max. measuring depth	100 mm (Min. inner diameter 30 mm)
Horizontal arm (R axis)	Horizontal motion range	165mm
	Excess range	25mm
	Horizontal motion drive way	by electric
Detector	Acquisition device	circular grating
	Sampling points number in circle	8192 points	14400 points
	Detector type	Inductive detector
	Detector measuring range	± 300 μm
	Detector resolution	Max. 0.001 μm
	R axis	High precision grating detector (resolution 0.5μm)
	Z axis	High precision grating detector (resolution 0.5μm)

[1]:  (H: the height from table)
[2]:  (λc is 2.5mm, optical flat sampling speed≤0.3mm/s.)