Features: Dual-axis grating counting technology, multi-element evaluation.
Can measure the cylindricity, perpendicularity, coaxiality and other parameters of the ring and rolling element.
Application:
Technical Specification:
Model No. |
CBS4100 |
CBS4200 |
Turntable unit |
Bearing type |
Air-floating |
Rotary accuracy[1] |
(0.025+6H/10000) μm |
Rotary speed |
6 rpm |
4 / 6 / 8 /10 rpm |
Table effective diameter |
180 mm |
Max. workpiece diameter |
420 mm |
560 mm |
Max. measuring diameter |
250 mm |
280 mm |
Max. table load-bearing |
25 kg |
Vertical axis (Z axis) |
Vertical motion range |
320 mm |
Vertical motion drive way |
by electric |
Column straightness[2] |
≤0.5 μm / 100 mm |
≤0.3 μm / 100 mm |
Max. measuring depth |
100 mm (Min. inner diameter 30 mm) |
Horizontal arm (R axis) |
Horizontal motion range |
165mm |
Excess range |
25mm |
Horizontal motion drive way |
by electric |
Detector |
Acquisition device |
circular grating |
Sampling points number in circle |
8192 points |
14400 points |
Detector type |
Inductive detector |
Detector measuring range |
± 300 μm |
Detector resolution |
Max. 0.001 μm |
R axis |
High precision grating detector (resolution 0.5μm) |
Z axis |
High precision grating detector (resolution 0.5μm) |
[1]: (H: the height from table)
[2]: (λc is 2.5mm, optical flat sampling speed≤0.3mm/s.)