Features: Mounted with low noise and digital contour detector.
Equipped with wide range no guide head roughness detector.
Good performance for wide range contour measurement,microscopic contour measurement.
Wide range roughness measurement.
Integrated instrument for high accuracy and wide range roughness and contour measurement.
Technical Specification:
| Model No. |
|
CBPR1000 |
CBPR2000 |
| Column |
Range |
320 ~ 620 mm |
| Drive unit |
Range |
100 ~ 200 mm |
| Indicating accuracy[1] |
± (1+2L/100) μm |
± (0.8+2L/100) μm |
| Straightness[2] |
≤0.8 μm / 100 mm |
≤0.5 μm / 100 mm |
| Contour Detector |
Range |
0 ~ ± 20 mm |
| Indicating accuracy[3] |
± (1.3+6 |H| /100) μm |
± (0.6+5 |H| /100) μm |
| Resolution |
0.01 ~ 0.2 μm |
| Roughness Detector |
Range |
± 300 μm |
± 500 μm |
| Range resolution ratio |
1:65536 |
1:262144 |
| Indicating accuracy |
≤ ± (7nm+ 3.5%) |
≤ ± (5nm+ 3.5%) |
| Repeatability[4] |
1σ≤2 nm |
1σ≤1 nm |
| Contour Accuracy |
Arc[5] |
≤ ± (2+ R/8) μm |
≤ ± (1.5+ R/12) μm |
| Angle[6] |
≤ ± 2' |
≤ ± 1' |
| Roughness Accuracy |
Residual noise[7] |
≤ 10 nm |
≤ 5 nm |
| Drive Speed |
X axis (horizontal direction) |
0.1 ~ 10 mm/s |
0.05 ~ 15 mm/s |
| Z axis (column) |
0.5 ~ 10 mm/s |
0.2 ~ 15 mm/s |
| Contour Measurement Function |
Workpiece surface line feature, point feature, distance between points,distance between lines. Position accuracy of each features,including distance,parallelism,verticality,angle,groove depth,groove width,radius,anslysis for straight line accuracy,convexity and contour. |
| Roughness Measurement Function |
Roughness Function:Ra, Rp, Rv, Rz, Rz(jis), R3z, RzDIN, Rzj, Rmax, Rc, Rt, Rq, Rsk, Rku, Rsm,Rs, R△q, Rk, Rpk, Rvk, Mr1, Mr2, Rmr Waveness Parameter:Wa, Wt, Wp, Wv, Wz, Wq, Wsm, Wsk, Wku, WmrOriginal Contour Parameter:Pa, Pt, Pp, Pv, Pz, Pq, Psm, Psk, Pku, Pmr |
[1]: (L: measuring length)
[2]: (λc is 2.5mm, optical flat sampling speed≤0.3mm/s.)
[3]: (H: measuring height)
[4]: (measuring with square wave standard gauge block, Ra is 0.35 ~ 0.5μm.)
[5]: (R: standard ball, 2mm＜R＜10mm,sampling arc angle is 120°.)
[6]: (60° and 90° angle block gauge,sampling angle edge length is 5mm.)
[7]: (λc is 0.08mm, optical flat sampling speed 0.1mm/s.)
Application:
